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(110) Surface Orientation for Reducing Fermi-Level-Pinning Between High-K Dielectric and Group Iii-V Compound Semiconductor Device
(110) Surface Orientation for Reducing Fermi-Level-Pinning Between High-K Dielectric and Group Iii-V Compound Semiconductor Device
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机译:(110)用于降低高K电介质和Iii-V组化合物半导体器件之间费米能级固定的表面取向
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摘要
A device with improved device performance, and method of manufacturing the same, are disclosed. An exemplary device includes a group III-V compound semiconductor substrate that includes a surface having a (110) crystallographic orientation, and a gate stack disposed over the group III-V compound semiconductor substrate. The gate stack includes a high-k dielectric layer disposed on the surface having the (110) crystallographic orientation, and a gate electrode disposed over the high-k dielectric layer.
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