Method of generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure and system for generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure

摘要

A method for preparation of supply pulses to generate a glow discharge between electrodes enclosed in a chamber with reduced gas pressure and a circuit for preparation of supply pulses to generate a glow discharge between electrodes enclosed in a chamber with reduced gas pressure.