ELECTRODE POLARIZATION CORRECTION METHOD FOR OPEN-ENDED COAXIAL PROBE AND PROCESSING TERMINAL

摘要

The present invention relates to an electrode polarization correction method for an open-ended coaxial probe and a processing terminal. The method comprises the following steps: step 1, presetting an equivalent circuit model of an open-ended coaxial probe and electrode polarization series impedance of the equivalent circuit model; step 2, receiving one group of actually measured data of net load impedance inputted by a user, and calculating values of a resistor R_p, a resistor R_s and a capacitor C_s; and step 3, subtracting the value of corresponding Z_s from the group of actually measured data of net load impedance to obtain de-polarized impedance so as to complete polarization correction. The present invention effectively reduces the electrode polarization error of a coaxial probe measurement system by means of data processing, without changing the physical structure of an open-ended coaxial probe, thereby achieving electrode polarization correction, simplifying the calculation, and facilitating promotion and use.