SILICON CHIP HAVING MULTI-ZONE THROUGH SILICON VIAS AND METHOD OF MANUFACTURING THE SAME

摘要

In one embodiment, a microfluidic device has a substrate that defines a first inlet for a continuous phase fluid, a second inlet for a dispersed phase fluid, and droplet generators that can produce micro-droplets from the continuous and dispersed phase fluids. The substrate defines (i) a plurality of delivery channels in fluid communication with the first and second inlets, each delivery channel having a first dimension along a first plane that is perpendicular to a transverse direction, and (ii) a plurality of trenches that extend from the delivery channels towards the droplet generators along the transverse direction. Each trench has a second dimension along a plane that is perpendicular to the transverse direction that is smaller than the first dimension. The substrate defines a plurality of vias that extend from the trenches to the droplet generators so as to fluidly connect the delivery channels with the droplet generators.