TIN TRAPPING DEVICE, EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

摘要

The present invention addresses the problem of suppressing reduction in reliability of an EUV light generation device as a result of tin being stuck to the inside of an exhaust pump (60) or tin flowing reverse from a drain tank and adhering to a focusing mirror. A tin trapping device (50) for recovering tin inside a chamber device in which the tin is formed into plasma by means of a laser beam in the internal space thereof is provided with: a casing (55) provide with a gas inlet port (55I) through which an exhaust gas in the chamber device flows in and a gas exhaust port (55E) through which the exhaust gas is discharged; and a main heater (51) that reaches a temperature not lower than the melting point of tin but lower than the boiling point of tin and that is disposed in the casing (55) such that a projection surface, obtained by projecting the main heater in a direction in which the exhaust gas at the gas inlet port (55I) flows, covers the gas inlet port.