LASER SYSTEM, EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR GENERATING EXTREME-ULTRAVIOLET LIGHT

摘要

A laser system comprises: a pulse laser system that emits first laser light having a first wavelength component and a first polarized component and second laser light having the first wavelength component and a second polarized component; a guide laser device that emits third laser light having a second wavelength component; a polarization conversion mechanism configured to switch between a first state of turning the third laser light into first guide laser light having the first polarized component and a second state of turning the third laser light into second guide laser light having the second polarized component; a dichroic mirror that reflects either one of the first and second laser light or the first and second guide laser light and transmits the other one; and a polarization beam splitter that reflects the first laser light and the first guide laser light and transmits the second laser light and the second guide laser light.