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MICROELECTRONIC DEVICE FOR ELECTRONIC SORBENT ASSAY AND FOR MONITORING BIOLOGICAL CELL DYNAMICS COMPRISING PSEUDO-CONDUCTIVE HIGH-ELECTRON MOBILITY TRANSISTOR (HEMT)
MICROELECTRONIC DEVICE FOR ELECTRONIC SORBENT ASSAY AND FOR MONITORING BIOLOGICAL CELL DYNAMICS COMPRISING PSEUDO-CONDUCTIVE HIGH-ELECTRON MOBILITY TRANSISTOR (HEMT)
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机译:微电子装置,用于电子吸附分析和监测包含伪导电高电子迁移率晶体管(HEMT)的生物细胞动力学
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摘要
The present invention provides a microelectronic device for sorbent, immunosorbent or cell sorbent assay and for measuring biological cell dynamics. The device is based on an open-gate pseudo-conductive high-electron mobility transistor, which is based on a multilayer hetero-junction structure being made of lll-V single- or polycrystalline semi-conductor materials and deposited on a substrate layer (10) or placed on a free-standing membrane. Said structure comprising at least one buffer layer (11) and at least one barrier layer (12), said layers being stacked alternately, wherein the thickness of a top (barrier or buffer) layer in an open gate area of said transistor is 5-9 nanometre (nm), which corresponds to the pseudo-conducting current range between normally-on and normally-off operation mode of the transistor, and the surface of said top layer has a roughness of about 0.2 nm or less. In addition, the present invention provides methods for sorbent, immunosorbent or cell sorbent assay and for measuring biological cell dynamics using said device.
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