Solids container, and solids product with solids filled in solids container

摘要

Provided is a solids container that can smoothly fill the solids and supply more solids vapor at a constant concentration. The solids container 1 is a solids container for supplying solids S1, S2 and S3 contained therein by evaporating the solids, and the carrier gas inflow line 11; A first filling zone 21 filled with solids S1; A second filling zone 22 located in at least a portion of the outer periphery of the first filling zone 21 and filled with solids S2; At least one tray-shaped third filling zone 23 disposed on the ceiling side inside the solid container 1; And a solids withdrawal line 12, wherein the carrier gas outlet portion 13 of the carrier gas inlet line 1 is provided in the first filling zone 21, and the inlet portion 14 of the solids withdrawal line 12 is provided. Is provided in the third filling zone 23, and the carrier gas flows in the order of the first filling zone 21, the second filling zone 22, and the third filling zone 23.