首页> 外国专利> WAFER LEVEL TESTING STRUCTURE FOR MULTI-SITES SOLUTION

WAFER LEVEL TESTING STRUCTURE FOR MULTI-SITES SOLUTION

机译:适用于多站点解决方案的晶圆级测试结构

摘要

The present invention provides a wafer level multi-site testing structure, including: a printed circuit board; at least two socket assemblies set side by side on the printed circuit board, wherein each socket assembly includes a socket base plate and a positioning stiffener to form a socket; at least two sub circuit board assemblies of which any one is installed within the socket to be removable, and each of which includes a sub circuit board and a final testing substrate; a fixating ring set on the printed circuit board and provided with a hollow portion, wherein the socket assembly and the sub circuit board assembly are positioned within the hollow portion; and a probe head assembly set above the sub circuit board assembly and fixated on the fixing ring. The present invention arranges a plurality of final testing substrates side by side according to positions to concurrently perform a wafer testing process at multi-sites, thereby improving testing efficiency, and also can be designed in a plug manner to provide convenient replacement and testing effects.
机译:本发明提供了一种晶圆级多站点测试结构,包括:印刷电路板;至少两个并排设置在印刷电路板上的插座组件,其中每个插座组件包括插座基板和用于形成插座的定位加强件;至少两个子电路板组件,其中任何一个安装在可拆卸的插座内,并且每个子电路板组件包括子电路板和最终测试基板;固定环设置在印刷电路板上并具有中空部分,其中,插座组件和子电路板组件位于中空部分内;探头组件设置在子电路板组件上方并固定在固定环上。本发明根据位置并排布置多个最终测试基板,以在多个位置同时执行晶片测试工艺,从而提高了测试效率,并且还可以以插接方式设计以提供方便的更换和测试效果。

著录项

  • 公开/公告号KR20200068002A

    专利类型

  • 公开/公告日2020-06-15

    原文格式PDF

  • 申请/专利权人 HERMES-EPITEK CORP.;

    申请/专利号KR20180079804

  • 发明设计人 HUNG CHIEN YAO;CHEN MING HSIEN;

    申请日2018-07-10

  • 分类号H01L21/66;G01R31/28;

  • 国家 KR

  • 入库时间 2022-08-21 11:06:49

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