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APPARATUS FOR ELECTRO-FORMING AND APPARATUS FOR HORIZONTAL ELECTRO-FORMING

机译:电铸设备和水平电铸设备

摘要

The electroplating apparatus according to the embodiment of the present specification is a plating bath, which is a space in which a substrate is plated, a clamp for holding a substrate disposed in the plating tank and disposed in a horizontal direction, and spaced apart from an upper portion of the substrate, with an external power source. The connected anode and the substrate are spaced apart from each other, and a combination including a plating solution supply unit for supplying a plating solution, a driving unit spaced apart from the substrate and reciprocated in a horizontal direction, and the combination includes an insulator between the anode and the plating solution supply unit , It is possible to provide a plated film having a constant thickness.
机译:根据本说明书的实施方式的电镀装置是镀浴,其是其中镀有基板的空间,用于保持基板的夹具,该夹具用于保持设置在镀槽中并沿水平方向设置,并与基板隔开。基板的上部,带有外部电源。连接的阳极和基板彼此隔开,并且包括:用于提供镀液的镀液供给单元;与基板隔开并且在水平方向上往复运动的驱动单元的组合,并且该组合包括绝缘体,该绝缘体在阳极和镀液供应单元中,可以提供具有恒定厚度的镀膜。

著录项

  • 公开/公告号KR20200082727A

    专利类型

  • 公开/公告日2020-07-08

    原文格式PDF

  • 申请/专利权人 엘지디스플레이 주식회사;

    申请/专利号KR20180173597

  • 发明设计人 유병선;김우찬;김고태;

    申请日2018-12-31

  • 分类号C25D17/12;C25D17;C25D17/06;C25D21/12;C25D5/04;C25D5/08;

  • 国家 KR

  • 入库时间 2022-08-21 11:06:30

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