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APPARATUS FOR ELECTRO-FORMING AND APPARATUS FOR HORIZONTAL ELECTRO-FORMING

机译:电铸设备和水平电铸设备

摘要

The electroplating apparatus according to the embodiment of the present specification is a plating bath, which is a space in which a substrate is plated, a clamp for holding a substrate disposed in the plating tank and disposed in a horizontal direction, and spaced apart from an upper portion of the substrate, with an external power source. The connected anode and the substrate are spaced apart from each other, and a combination including a plating solution supply unit for supplying a plating solution, a driving unit spaced apart from the substrate and reciprocated in a horizontal direction, and the combination includes an insulator between the anode and the plating solution supply unit , It is possible to provide a plated film having a constant thickness.
机译:根据本说明书的实施方式的电镀装置是电镀浴,其是其中电镀基板的空间,用于保持基板的夹具,该夹具用于保持设置在电镀槽中并沿水平方向设置并且与基板隔开的距离。基板的上部,带有外部电源。连接的阳极和基板彼此间隔开,并且其组合包括:用于提供镀液的镀液供应单元;与基板间隔开并且在水平方向上往复运动的驱动单元,并且该组合包括绝缘体。在阳极和镀液供应单元中,可以提供具有恒定厚度的镀膜。

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