首页>
外国专利>
APPARATUS FOR ELECTRO-FORMING AND APPARATUS FOR HORIZONTAL ELECTRO-FORMING
APPARATUS FOR ELECTRO-FORMING AND APPARATUS FOR HORIZONTAL ELECTRO-FORMING
展开▼
机译:电铸设备和水平电铸设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
The electroplating apparatus according to the embodiment of the present specification is a plating bath, which is a space in which a substrate is plated, a clamp for holding a substrate disposed in the plating tank and disposed in a horizontal direction, and spaced apart from an upper portion of the substrate, with an external power source. The connected anode and the substrate are spaced apart from each other, and a combination including a plating solution supply unit for supplying a plating solution, a driving unit spaced apart from the substrate and reciprocated in a horizontal direction, and the combination includes an insulator between the anode and the plating solution supply unit , It is possible to provide a plated film having a constant thickness.
展开▼