A method used to form at least a portion of at least one conductive capacitor electrode of a capacitor comprising a pair of conductive capacitor electrodes having a capacitor insulator therebetween and a method of forming a capacitor

摘要

The method used to form at least a portion of at least one conductive capacitor electrode of a capacitor comprising a pair of conductive capacitor electrodes having a capacitor insulator therebetween includes forming an insulating first material comprising an amorphous insulating metal oxide. . In the reducing atmosphere, the amorphous insulating metal oxide is reduced to form a conductive second material from the insulating first material. Such reduction in the reducing atmosphere (a) removes oxygen from the metal oxide, alters the stoichiometry of the metal oxide, and (b) crystallizes the metal oxide into a conductive crystalline state.