SILICON NANOWIRE-BASED PIEZORESISTIVE MICROPHONE AND METHOD FOR MANUFACTURING SAME

摘要

The present invention provides a silicone nanowire-based piezoresistive microphone and a method of manufacturing the same. According to the present invention, the method of manufacturing a silicone nanowire-based piezoresistive microphone comprises: a first step of forming a silicon nanowire and a sensor structure on a silicon substrate; a second step of forming a membrane surrounding the silicon nanowire and the sensor structure; and a third step of forming a cavity in the silicon substrate to float the membrane and forming a vent hole.;COPYRIGHT KIPO 2020