APPARATUS AND METHODS FOR CAROUSEL ATOMIC LAYER DEPOSITION

摘要

Gas distribution assemblies and susceptor assemblies comprised of a plurality of pie-shaped segments that can be individually leveled, moved or modified are described. Also described are processing chambers that include gas distribution assemblies, susceptor assemblies, sensors, and feedback circuits for adjusting the gap between the susceptor and the gas distribution assembly. Methods of using gas distribution assemblies, susceptor assemblies and processing chambers are also described.