GRAPHENE METASURFACE BASED MOLECULAR SENSOR WITH ENHANCED SENSITIVITY USING MULTISCALE TECHNIQUE AND MANUFACTURING METHOD THEREOF

摘要

A molecular detection sensor including a substrate, a slit formed on the substrate, a plasmon resonator pattern positioned in the slit on the substrate, and a reflective layer formed at a lower end of the substrate is provided. The plasmon resonator pattern generates plasmon resonance when infrared light is irradiated, and the type of target molecule may be detected based on the light absorption rate of the plasmon resonator pattern measured when infrared light is irradiated.