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EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER DEPOSITION

机译:原子层沉积沉积的耐腐蚀金属氟化物涂层

摘要

Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with rare earth metals including fluoride coatings. The coating can include at least a first metal (eg, rare earth metal, tantalum, zirconium, etc.) and a second metal, co-deposited on the surface of the article. The coating may comprise a homogeneous mixture of the first metal and the second metal and does not include mechanical separation between the layers in the coating.
机译:本公开的实施方案涉及制品,涂覆的制品以及用包括氟化物涂层的稀土金属涂覆此类制品的方法。涂层可包括至少第一金属(例如,稀土金属,钽,锆等)和第二金属,其共沉积在制品的表面上。涂层可以包括第一金属和第二金属的均质混合物,并且不包括涂层中各层之间的机械分离。

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