Wafer Cassette Dry Oven Stocker and Wafer Cassette Dry Method Using It

摘要

Examples include a cassette in which a plurality of wafers are loaded; A plurality of chambers which are arranged in a row in at least one layer, and the cassettes after cleaning are respectively inserted inside; It provides a wafer cassette stocker comprising a; humidity control unit to control the humidity of the cassette by supplying compressed dry air (CDA) into the chamber.