APPARATUS AND METHOD FOR OBSERVING SPECIMEN

摘要

The present invention is arranged to face the support portion capable of supporting the sample, the column portion having one side toward the support portion open, the charged particle generating portion installed inside the column portion, and the column portion coupled to the opening, the charged particles and 2 A sample observing apparatus including a cover portion having an aperture through which secondary particles can pass, and a sample observing method using the same, when observing a sample at atmospheric pressure using charged particles, the loss of charged particles and secondary particles A sample observation device and method for reducing the resolution of a sample image is proposed.