OPTO-MECHANICAL PHYSICAL SENSOR WITH IMPROVED SENSITIVITY

摘要

Physical sensor comprising a substrate (4), a moving mass (8), said mass (8) being able to be moved by an external force, a first optical resonator (16.1), a light waveguide (18.1) measuring device and a detection light waveguide, a rigid plate (10) able to modify the optical resonance frequency of said optical resonator (16.1) by bringing it closer to and away from it, a lever arm (6) articulated in rotation on the substrate (4) by a pivot connection (12) and the mass (8) being integral in movement with the transmission means (6), the rigid plate (10) being arranged relative to the mass (8) and to the pivot connection (12) so that the lever arm (6) transmits to the rigid plate (10) amplified the movement of the mass (8).