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A spectroscopic and electrochemical study of chlorotitanates in molten salt media

机译:氯硅酸盐在熔盐介质中的光谱和电化学研究

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摘要

Ultra-high purity titanium is used as a barrier metal in integrated circuitry. Metallothermic reduction does not produce titanium sufficiently pure for micro-electronics applications so electro refining of the metal in a molten chloride bath at temperatures above 700°C is necessary. The present study focused on the electrorefining of titanium in a bath consisting of the CsCl-NaCl-KCl eutectic as the solvent. Interfacial phenomena (multiple reaction steps and the kinetics associated with each) related to the faradaic process were investigated with electroanalytical techniques. The bulk chemistry of the electrolyte (the structure of the chlorotitanate complexes) that describes the nature of the species present during the electrorefining process was investigated using spectroscopic techniques. Recommendations were made concerning the potential for the various technologies to be used for on-line control to improve operating practices. Electrode kinetics were studied by ac voltammetry. Phase angle information was used to determine the value of the standard rate constant ([alpha) and the transfer coefficient (a) for the reduction couples Ti3+/Ti2+ and Ti2+/Ti0 at a glassy carbon electrode. The reduction from Ti2+ to metal has been identified as the slow step in the electrorefining process. The utility of electrochemical sensing to observe concentration changes has been judged poor. Industrial use of reference electrodes is recommended for controlling the overpotential in the electrorefining process and to improve efficiency. Absorption spectroscopy has established that a temperature sensitive equilibrium between TiC16 3- and TiCl4- exists in the CsCl-NaCl-KCl eutectic. Fiber optic absorption spectroscopy was shown to be capable of detecting additions of Ti2+ to melts containing Ti8+ , as well as sensing Ti3+ concentration fluctuations at a level of ±+5mM. Raman spectroscopy was found to be ill suited for investigating complexation in this system due to the deeply colored nature of the melts.
机译:超高纯钛在集成电路中用作阻挡金属。金属热还原不能产生足以用于微电子应用的纯钛,因此必须在高于700°C的温度下在熔融氯化物浴中对金属进行电精炼。本研究的重点是在含有CsCl-NaCl-KCl共晶溶剂的浴中对钛进行电精炼。用电分析技术研究了与法拉第过程相关的界面现象(多个反应步骤以及与之相关的动力学)。使用光谱技术研究了描述电精炼过程中存在的物质性质的电解质的本体化学(氯钛酸酯络合物的结构)。提出了有关将各种技术用于在线控制以改善操作规范的潜力的建议。通过交流伏安法研究电极动力学。相角信息用于确定玻璃碳电极上的还原对Ti3 + / Ti2 +和Ti2 + / Ti0的标准速率常数(α)和传递系数(a)的值。从Ti2 +还原为金属已被认为是电精炼过程中的缓慢步骤。电化学传感观察浓度变化的实用性被认为很差。建议在工业上使用参比电极,以控制电精制过程中的过电势并提高效率。吸收光谱法已确定CsCl-NaCl-KCl共晶物中存在TiC16 3-和TiCl4-之间的温度敏感平衡。光纤吸收光谱法能够检测到含Ti8 +的熔体中Ti2 +的添加,并能够检测出±3mM的Ti3 +浓度波动。由于熔体颜色深,拉曼光谱法不适合研究该系统中的络合物。

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