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Structural and High Frequency Dielectric Properties of Ba(ZrxTi1-x)O3 Films Prepared by Reactive Magnetron Sputtering Using Metal Targets

机译：金属靶反应磁控溅射制备Ba（ZrxTi1-x）O3薄膜的结构和高频介电性能

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Jin Woong Kim; Hiromi Shima; Takashi Yamamoto; Hiroshi Funakubo; Ken Nishida;
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1. Structural and optical properties of BaTiO3 thin films prepared by radio-frequency magnetron sputtering at various substrate temperatures [J] . Reddy YKV, Mergel D, Reuter S, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2006,第6期

机译：射频磁控溅射在不同衬底温度下制备的BaTiO3薄膜的结构和光学性质
2. Effect of bias voltage on microstructure and optical properties of Al2O3 thin films prepared by twin targets reactive high power impulse magnetron sputtering [J] . Zhou Guangxue, Wang Langping, Wang Xiaofeng, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2019,第期

机译：偏压对双胞胎术反应高功率脉冲磁控溅射制备的Al2O3薄膜微结构和光学性能的影响
3. Effect of sputtering pressure on structural and dielectric tunable properties of BaSn0.15Ti0.85O3 thin films grown by magnetron sputtering [J] . Wu Muying, Zhang Chunmei, Yu Shihui, CERAMICS INTERNATIONAL . 2018,第9期

机译：溅射压力对Basn0.15Ti0.8503薄膜结构和介电可调性能的影响
4. Structural and High Frequency Dielectric Properties of Ba(Zr_xTi_(1-x))O3 Films Prepared by Reactive Magnetron Sputtering Using Metal Targets [C] . Jin Woong Kim, Hiromi Shima, Takashi Yamamoto International Ceramics Congress . 2014

机译：使用金属靶标的反应磁控溅射制备的BA（Zr_XTI_（1-X））O3膜的结构和高频介电性能
5. Structural, dielectric, and optical properties of potassium tantalate niobate thin films prepared by metalorganic chemical vapor deposition [D] . Nichols, Barbara Michelle. 2000

机译：金属有机化学气相沉积法制备钽酸钽铌酸钾薄膜的结构，介电和光学性质
6. Application-Specific Oxide-Based and Metal–Dielectric Thin-Film Materials Prepared by Radio Frequency Magnetron Sputtering [O] . Mohammad Nur-E-Alam, Wade Lonsdale, Mikhail Vasiliev, 2019

机译：射频磁控溅射制备基于特定用途的氧化物基和金属介电薄膜材料
7. Structural and optical properties of visible active photocatalytic WO3 thin films prepared by reactive dc magnetron sputtering [O] . Johansson, Malin B, Niklasson, Gunnar A., Österlund, Lars 2012

机译：反应直流磁控溅射制备可见活性光催化WO3薄膜的结构和光学性质

Structural and High Frequency Dielectric Properties of Ba(ZrxTi1-x)O3 Films Prepared by Reactive Magnetron Sputtering Using Metal Targets

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