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Wavelength decomposition analysis of surface generation in the ultraprecision machining of brittle single crystals

机译:脆性单晶超精密加工中表面生成的波长分解分析

摘要

Brittle single crystals present special characteristics that are not encountered in ultraprecision machining of ductile materials. The conventional surface characterization approaches based on surface roughness parameters and power spectrum analysis are inadequate for characterizing the surface generation. In this paper, a wavelength decomposition analysis is proposed that provides a component-by-component wavelength decomposition of the surface roughness profiles at a finite number of radial sections of the machined surfaces. Experimental results indicate that wavelength decomposition analysis provides an effective way of characterizing quantitatively the effect of different surface generation mechanisms such as the brittle-ductile transition on surface roughness in the ultraprecision machining of brittle single crystals.
机译:脆性单晶具有延性材料的超精密加工所没有的特殊特性。基于表面粗糙度参数和功率谱分析的常规表面表征方法不足以表征表面产生。在本文中,提出了一种波长分解分析,该分析提供了有限数量的加工表面径向截面上的表面粗糙度轮廓的逐组分波长分解。实验结果表明,波长分解分析为定量表征脆性单晶的超精密加工中不同表面生成机制(如脆性-延性转变)对表面粗糙度的影响提供了有效的方法。

著录项

  • 作者

    Cheung CF;

  • 作者单位
  • 年度 2004
  • 总页数
  • 原文格式 PDF
  • 正文语种 eng
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