Work presented aims at the optimization and the realization of a gyrometer micro-machined with vibrating beam on substrate silicon. This work falls under the continuity of theses previously carried out to FEMTO-ST institute and devoted to the development of a structure of star gyrometer. This configuration is appropriate to the realization of velocity angular measurements in the plan of the substrate. The context of the thesis is consisted a research project submitted an evolution of the gyrometer silicon with passage of a capacitive detection to an optical detection. This is why the report naturally proposes an in-depth redimensioning of the sensor. Thus, a significant number of studies by finite elements were carried out to optimize the vibrating structure. This optimization enabled us to respect the schedule of conditions with respect to the frequencies of excitation and detections, while rejecting the parasitic modes. Complementary electromechanical studies made it possible to include/understand in detail specificities resulting from the choice of the capacitive excitation. This work led to the development of an optimized structure, associated a redefinition of the manufactoring processes in clean room. Several series of micro-machined sensors thus could be carried out, giving place to exploitable structures, validating the new design with its associated process. The recourse to a probe heterodyne receiver then made it possible to measure out-plan displacements according to the signal of excitation, thus validating the primary dynamic behavior of the structures.
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