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Neutral gas depletion mechanisms in dense low-temperature argon plasmas

机译:致密低温氩等离子体中的中性气体耗竭机理

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摘要

Neutral gas depletion mechanisms are investigated in a dense low-temperature argon plasma-an inductively coupled magnetic neutral loop (NL) discharge. Gas temperatures are deduced from the Doppler profile of the 772.38 nm line absorbed by argon metastable atoms. Electron density and temperature measurements reveal that at pressures below 0.1 Pa, relatively high degrees of ionization (exceeding 1%) result in electron pressures, p(e) = kT(e)n(e), exceeding the neutral gas pressure. In this regime, neutral dynamics has to be taken into account and depletion through comparatively high ionization rates becomes important. This additional depletion mechanism can be spatially separated due to non-uniform electron temperature and density profiles (non-uniform ionization rate), while the gas temperature is rather uniform within the discharge region. Spatial profiles of the depletion of metastable argon atoms in the NL region are observed by laser induced fluorescence spectroscopy. In this region, the depletion of ground state argon atoms is expected to be even more pronounced since in the investigated high electron density regime the ratio of metastable and ground state argon atom densities is governed by the electron temperature, which peaks in the NL region. This neutral gas depletion is attributed to a high ionization rate in the NL zone and fast ion loss through ambipolar diffusion along the magnetic field lines. This is totally different from what is observed at pressures above 10 Pa where the degree of ionization is relatively low (
机译:在稠密的低温氩等离子体中研究了中性气体耗竭机理-感应耦合磁中性回路(NL)放电。气体温度是由被氩亚稳原子吸收的772.38 nm谱线的多普勒轮廓推导出的。电子密度和温度测量表明,在低于0.1 Pa的压力下,较高的电离度(超过1%)会导致电子压力p(e)= kT(e)n(e),超过中性气体压力。在这种情况下,必须考虑中性动力学,通过相对较高的电离速率进行耗尽变得很重要。由于电子温度和密度分布不​​均匀(电离率不均匀),这种附加的耗尽机制可以在空间上分开,而放电区域内的气体温度相当均匀。通过激光诱导荧光光谱观察到NL区域中亚稳态氩原子的消耗的空间分布。在该区域,由于在研究的高电子密度条件下,亚稳态和基态氩原子密度之比受电子温度控制,该温度在NL区域达到峰值,因此预计基态氩原子的消耗将更加明显。这种中性气体的消耗归因于NL区域中的高电离率,以及由于沿磁场线的双极扩散而导致的快速离子流失。这与在10 Pa以上的压力下电离度相对较低(

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