A concept of moving dielectrophoresis electrodes based on microelectromechanical systems (MEMS) actuators

摘要

A concept of moving dielectrophoresis electrodes (MDEP) based on Microelectromechanical Systems (MEMS) actuators is introduced in this letter. An example design of tuneable dielectrophoresis filter is presented. Finite Element Analysis of the electrostatic field of the tuneable filter has been conducted. Results show that the trapping force can be adjusted by actuating the MEMS actuators.