Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor

摘要

Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the sub-micro-Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promote the complexity of micro/nano manipulation, and will facilitate to realize automating the micro/nano manipulation.