In order to build machines, electronic devices, it is necessary to know all properties of the materials.The machines and electronic devices use parts that are interconnected, the mechanical propertiesare important, but for some specific tasks the electrical properties are more important. In this senseit is necessary to predict the behavior of this parts in different temperatures to the environment.The present thesis focus on implementation of a 4-probe measuring system to determinate thesheet resistance of thin film samples showing the dependency of the resistivity on the film thicknessas well as on the deposition temperature. The method used to determine the resistivity is themodified van der Pauw Method. Therefore, it is important the measurement of the current and thevoltage drop in the sample. It is also important to measure the distance between tips, in order tocalculate the resistivity. Furthermore, it is also important to find the correct transformation thatmaps any four point of a plane to a new plane with four collinear points. The measurements arecontrolled via LabVIEW and the measured data is displayed in the user interface.
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