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Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curves

机译:由rf击穿曲线确定的强电场中氩,氮,氢,氧和氨中的电子漂移速度

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摘要

We report measurements of the breakdown curves for low-pressure rf capacitiveuddischarges in nitrogen, hydrogen, argon, oxygen and ammonia. The electron driftudvelocity in these gases was deduced, as a function of reduced electric field, fromudthe low-pressure turning points of the breakdown curves. The equation for rfudbreakdown proposed by Kihara (1952 Rev. Mod. Phys. 24 52) allows the position of both the turning point and the breakdown curve minimum to be calculated from the transport properties of each gas. Therefore we propose a new technique to determine the electron drift velocity from the position of the rf breakdown curve minima. We have determined the drift velocity in the range E/p = 52–1324 Vcm−1 Torr−1 for nitrogen, E/p = 33–720 Vcm−1 Torr−1 for argon, E/p = 32–713 Vcm−1 Torr−1 for ammonia, E/p = 32–550 Vcm−1 Torr−1 for hydrogen and E/p = 69–1673 Vcm−1 Torr−1 for oxygen.
机译:我们报告了在氮气,氢气,氩气,氧气和氨气中低压射频电容放电的击穿曲线的测量值。根据击穿曲线的低压转折点,根据减小的电场推导了这些气体中的电子漂移/速度。 Kihara(1952 Rev. Mod。Phys。24 52)提出的rf udbreakdown方程允许根据每种气体的传输特性来计算转折点和击穿曲线的最小值。因此,我们提出了一种新技术,可以根据rf击穿曲线最小值的位置确定电子漂移速度。对于氮气,我们确定了漂移速度E / p = 52–1324 Vcm-1 Torr-1,对于氩气,E / p = 33–720 Vcm-1 Torr-1,E / p = 32–713 Vcm-1氨为1 Torr-1,氢为E / p = 32–550 Vcm-1托,氧气为E / p = 69–1673 Vcm-1 Torr-1。

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