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Device Architecture and Materials for Organic Ferroelectric Memory Arrays

机译:有机铁电存储器阵列的器件架构和材料

摘要

In recent years, organic thin-film electronics have emerged as a route towards flexible, low-cost, large area applications, which are unfeasible in the current silicon technology. For example, low-cost radio frequency identification (RFID) tags that can be placed on any object, as envisioned by the ’Internet of Things’, for smart labeling, security, monitoring, or tracking purposes. For these applications, a nonvolatile memory functionality is crucial for their intended operation. Therefore, simultaneous to the development of organic transistors and circuits, progress needs to be made towards a compatible nonvolatile, electrically reprogrammable memory array. In this doctoral research, we aim to realize such an organic memory array that can be integrated with the organic logic circuits on the same, flexible substrate. More specifically, we focus on the device architecture and materials of ferroelectric field-effect transistors (FeFET) as the basic memory unit. The objective of this work was pursued by a combination of i) technological advancements over the state-of-the-art; ii) further understanding of the device operation; iii) devising a read-and write scheme suited for an array; and iv) use of novel materials and device architectures. By optimizing the processing conditions, we demonstrate high-performance bottom gate - top contact (BG-TC) FeFETs with pentacene as the organic semiconductor, as shown in Chapter 2. These memory devices can switch within a few ms, and can be cycled for at least 10000 times. In addition, we experimentally demonstrate a long term retention data of more than one year. These results make this device highly promising for non-volatile memory applications. Unexpectedly for a bi-stable material, the BG-TC FeFET shows three reprogrammable memory states: ’OFF’, ’Intermediate’ and ’ON’ state. Using Scanning Kelvin Probe Microscopy, we elucidate the device operation in this device structure in Chapter 3. These measurements show that the ferroelectric layer in the channel region of the FeFET is not fully polarized in the ’OFF’ and ’Intermediate’ states. The difference between these two states can be explained by a different injection property of the contacts, caused by the ferroelectric polarization state underneath the source-drain contacts. This refinement clarifies the peculiarities experimentally found in literature, as well as in our own results. To integrate with organic circuits, as well as to fabricate memory arrays, photolithography must be used. In addition, the bottom gate - bottom contact (BG-BC) device architecture needs to be adopted. By further technology development, we realize such a memory FeFET that can be integrated with current state-of-the-art organic circuits on flexible substrates, as demonstrated in Chapter 4. Moreover, we employ this technology to fabricate a passive NAND array, as described in Chapter 5. The NAND architecture was chosen, as it offers the highest possible density of all transistor memory arrays. Despite the fact that passive arrays are more challenging to reliably address all FeFETs, we demonstrate a non-destructive read and write operation in the NAND array. Finally, novel device architecture and materials are explored to improve the memory characteristics in Chapter 6. Replacing pentacene with novel, high mobility semiconductors alone are proven to be unsuccessful to enlarge the memory window in the BG-BC FeFET. On the other hand, by adapting a planar heterojunction structure in the device, the memory window can be significantly enlarged by 30-60 %. The heterojunction device architecture is promising for further improvements, as many combinations of organic semiconducting materials are possible.
机译:近年来,有机薄膜电子已成为通向柔性,低成本,大面积应用的途径,这在当前的硅技术中是不可行的。例如,低成本的射频识别(RFID)标签可以被放置在“物联网”所设想的任何物体上,用于智能标记,安全性,监视或跟踪目的。对于这些应用,非易失性存储器功能对其预期的操作至关重要。因此,在开发有机晶体管和电路的同时,需要朝着兼容的非易失性,电可重编程存储器阵列的方向发展。在此博士研究中,我们旨在实现可与有机逻辑电路集成在同一块柔性基板上的有机存储阵列。更具体地说,我们专注于作为基本存储单元的铁电场效应晶体管(FeFET)的器件架构和材料。这项工作的目标是通过结合以下各项追求的:i)超越现有技术的技术进步; ii)进一步了解设备操作; iii)设计适合于阵列的读写方案; iv)使用新颖的材料和设备架构。通过优化工艺条件,我们演示了以并五苯为有机半导体的高性能底栅-顶接触(BG-TC)FeFET,如第2章所示。这些存储器件可以在几毫秒内切换,并且可以循环使用。至少10000次。此外,我们通过实验证明了超过一年的长期保留数据。这些结果使该器件非常适合非易失性存储器应用。出乎意料的是,对于双稳态材料,BG-TC FeFET会显示三种可重新编程的存储状态:“ OFF”,“ Intermediate”和“ ON”状态。我们使用扫描开尔文探针显微镜在第3章中阐明了该器件结构中的器件操作。这些测量结果表明,FeFET沟道区中的铁​​电层在“ OFF”和“ Intermediate”状态下并未完全极化。这两种状态之间的差异可以通过源极-漏极触点下方的铁电极化状态引起的触点注入特性不同来解释。这种改进澄清了在实验中以及我们自己的结果中实验发现的特性。为了与有机电路集成以及制造存储器阵列,必须使用光刻。另外,需要采用底栅-底接触(BG-BC)器件架构。通过进一步的技术开发,我们实现了这种存储器FeFET,可以与柔性衬底上的当前最先进的有机电路集成在一起,如第4章所示。此外,我们还采用了该技术来制造无源NAND阵列。之所以选择第5章中描述的NAND架构,是因为它提供了所有晶体管存储阵列中最高的密度。尽管无源阵列要可靠地寻址所有FeFET更具挑战性,但我们展示了NAND​​阵列中的无损读写操作。最后,在第6章中探索了新颖的器件架构和材料来改善存储特性。事实证明,仅用新颖的高迁移率半导体代替并五苯就无法扩大BG-BC FeFET的存储窗口。另一方面,通过在器件中采用平面异质结结构,可以将存储窗口显着增大30-60%。异质结器件架构有望进一步改进,因为有机半导体材料的许多组合都是可能的。

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    Kam Benjamin;

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  • 年度 2014
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