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Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy

机译：通过空腔倒闭光谱法在双频电容等离子体蚀刻反应器中测量氟负离子密度测量

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Jean-Paul Booth; Cormac S. Corr; Garrett A. Curley; Jacques Jolly; Jean Guillon; Tomas Földes;
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年度 2006
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1. Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy [J] . Jean-Paul Booth, Cormac S. Corr, Garrett A. Curley, Applied Physics Letters . 2006,第15期

机译：用腔衰荡光谱法测量双频电容等离子体蚀刻反应器中的氟负离子密度
2. Dual-laser frequency-stabilized cavity ring-down spectroscopy for water vapor density measurements [J] . Fasci Eugenio, Dinesan Hemanth, Moretti Luigi, Metrologia: International Journal of Scientific Metrology: = Internationale Zeitschrift fur Wissenschaftliche Metrologie: = Journal International de Metrologie Scientifique . 2018,第5期

机译：用于水蒸气密度测量的双激光频率稳定腔响距光谱分辨率
3. Spatial Distributions of Electron, CF, and CF_2 Radical Densities and Gas Temperature in DC-Superposed Dual-Frequency Capacitively Coupled Plasma Etch Reactor Employing Cyclic-C_4F_8/N_2/Ar Gas [J] . Tsuyoshi Yamaguchi, Tetsuya Kimura, Chishio Koshimizu, Japanese journal of applied physics . 2011,第5Issue1期

机译：使用循环C_4F_8 / N_2 / Ar气的直流叠加双频等离子刻蚀反应堆中电子，CF和CF_2自由基密度和气体温度的空间分布
4. Three-dimensional distributions of methyl density in a hot-filament CVD reactor: comparison with cavity ring-down spectroscopy measurements [C] . Y.A. Mankelevich, Nikolay V. Suetin Conference on lasers in synthesis, characterization,and processing of diamond . 1998

机译：热丝CVD反应器中甲基密度的三维分布：与腔斜谱光谱测量的比较
5. Instrument Development and Measurements of the Atmospheric Pollutants Sulfur Dioxide, Nitrate Radical, and Nitrous Acid by Cavity Ring-down Spectroscopy and Cavity Enhanced Absorption Spectroscopy [D] . Medina, David Salvador 2011

机译：腔衰荡光谱和腔增强吸收光谱法测定大气污染物二氧化硫，硝酸根和亚硝酸的仪器开发和测量
6. Measurements of Carbon-14 With Cavity Ring-Down Spectroscopy [O] . A. D. McCartt, T. Ognibene, G. Bench, -1

机译：腔衰荡光谱法测量碳14
7. Quantitative measurements of oxygen atom and negative ion densities in a low pressure oxygen plasma by cavity ringdown spectroscopy [O] . Robert Peverall, Samuel D A Rogers, Grant A D Ritchie 2020

机译：腔匝数光谱法测量低压氧等离子体中的氧原子和负离子密度的定量测量
8. Ultra-Sensitive Elemental and Isotope Measurements with Compact Plasma Source Cavity Ring-Down Spectroscopy (CPS-CRDS) [R] . 2004

机译：使用紧凑型等离子体源腔衰荡光谱（Cps-CRDs）进行超灵敏元素和同位素测量

Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy

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