Cavity opto-mechanics enabled radiation pressure (RP) driven oscillatorsshown in the past offer an all optical Radio Frequency (RF) source without theneed for external electrical feedback. However these oscillators requireexternal tapered fiber or prism coupling and non-standard fabricationprocesses. In this work, we present a CMOS compatible fabrication process todesign high optical quality factor opto-mechanical resonators in siliconnitride. The ring resonators designed in this process demonstrate low phasenoise RP driven oscillations. Using integrated grating couplers and waveguideto couple light to the micro-resonator eliminates 1/f^3 and other higher orderphase noise slopes at close-to-carrier frequencies present in previousdemonstrations. We present an RP driven OMO operating at 41.97MHz with a signalpower of -11dBm and phase noise of -85dBc/Hz at 1kHz offset with only 1/f^2noise down to 10Hz offset from carrier.
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机译：腔光电工机械启用辐射压力（RP）驱动的振荡器在过去提供了所有光学射频（RF）源，而没有用于外部电气反馈。然而，这些振荡器需要X型锥形纤维或棱镜耦合和非标准的制造过程。在这项工作中，我们在硅氮化物中展示了CMOS兼容制造过程倾斜高光学质量因子光机械谐振器。在该过程中设计的环形谐振器展示了低泛孔RP驱动的振荡。使用集成光栅耦合器和WaveGuideto耦合光对微谐振器消除了在初步发作中存在的近载频率下的1 / f ^ 3和其他更高的级级噪声斜率。我们在41.97MHz上运行的RP驱动OMO，信号偏差为-11dBm / hz的信号噪声，在1khz偏移中，只有1 / f ^ 2noise向下偏移到载体的10Hz偏移量。
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