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Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses

机译：低流量小飞秒激光脉冲诱导等离子体近场消融硅基氧化膜周期纳米结构的制备

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Tatsuyoshi Takaya; Godai Miyaji; Issei Takahashi; Lukas Janos Richter; Jürgen Ihlemann;
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1. Inducing subwavelength periodic nanostructures on multilayer NiPd thin film by low-fluence femtosecond laser beam [J] . Kovacevic Aleksander G., Petrovic Suzana, Lazovic Vladimir, Applied Surface Science . 2017,第sepa30期

机译：低通量飞秒激光束在多层NiPd薄膜上诱导亚波长周期性纳米结构
2. Fabrication of nanostructured Al_2CuMg thin film by femtosecond pulsed laser ablation [J] . M. Jaime Vasquez, G.P. Halada, C.R. Clayton, Thin Solid Films . 2004,第1a2期

机译：飞秒脉冲激光烧蚀制备纳米Al_2CuMg纳米薄膜
3. Fabrication of silicon nanostructured films by deposition of size-selected nanoparticles generated by pulsed laser ablation [J] . Takafumi Seto, Takaaki Orii, Makoto Hirasawa, Thin Solid Films . 2003,第1a2期

机译：通过沉积由脉冲激光烧蚀产生的尺寸选择的纳米颗粒来制造硅纳米结构薄膜
4. Direct nanofabrication on solids with plasmonic near-field ablation induced by femtosecond laser pulses - (PPT) [C] . Godai Miyaji International Congress on Applications of Lasers Electro-Optics . 2020

机译：由飞秒激光脉冲引起的等离子体近场消融的固体直接纳米 - （PPT）
5. Femtosecond pulsed laser ablation and patterning of 3C-silicon carbide films on silicon substrates for MEMS fabrication. [D] . Dong, Yuanyuan. 2004

机译：飞秒脉冲激光烧蚀和硅衬底上用于MEMS制造的3C碳化硅膜的图案化。
6. Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses [O] . Tatsuyoshi Takaya, Godai Miyaji, Issei Takahashi, 2020

机译：低流量小飞秒激光脉冲诱导等离子体近场消融硅基氧化膜周期纳米结构的制备
7. Periodic Nanostructure Formation on Silicon Irradiated with Multiple Low-fluence Femtosecond Laser Pulses in Water [O] . Miyazaki Kenzo, Miyaji Godai 2012

机译：水中多次低能飞秒激光脉冲辐照的硅上的周期性纳米结构形成
8. Ultraviolet Femtosecond and Nanosecond Laser Ablation of Silicon: Ablation Efficiency and Laser-Induced Plasma Expansion [R] . Zong, X., Mao, X., Greif, R., 2005

机译：紫外飞秒和纳秒激光烧蚀硅：烧蚀效率和激光诱导等离子体膨胀

Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses

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