Modeling and Analysis of SOI Gratings-Based Opto-Fluidic Biosensor for Lab-on-a-Chip Applications

摘要

The design, modeling, and analysis of a silicon-on-insulator (SOI) grating coupler integrated with a microfluidic channel for lab-on-a-chip applications are presented. The grating coupler was designed to operate at 1310 nm. The simulated SOI structure consisted of a 220 nm top-Si device layer with an integrated waveguide, grating coupler, and a buried oxide layer of 2 µm. A rectangular microfluidic channel was deposited on the SOI optical grating structure for light and fluid interaction. The fluidic flow through the device was driven by centrifugal and Coriolis forces. The grating structure was designed to achieve a maximum coupling efficiency at the optimized injection angle of the light source. The sensitivity of the grating structure could be analyzed and evaluated using the change in coupled power as a function of the effective refractive index and was found to be 0.928 × 10−6 RIU. The SOI optical grating structure along with the micro fluidic channel on top could be effectively used as an absorbance-based lab-on-a-chip biosensor.