Using ellipsometry methods for depth analyzing the optical disc data layer relief structures

摘要

We studied the relief depth of the data layer formed in a glass disk by ion beamudetching process with using classical ellipsometry at the constant wavelength 632.8 nm foruddifferent angles of incidence. It was found that for 0° and 90° azimuth angles, a pair ofudellipsometric parameters Ψ and ∆ is sufficient to characterize the changes in lightudreflection for various structure depths. The depth of optical disc data layer reliefudstructures was estimated via experimental dependences of ellipsometric parameters. Theudestimated data layer depths were found to be in good agreement with independentudtunnelling electron microscopy measurements.