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Paraboloid Structured Silicon Surface for Enhanced Light Absorption: Experimental and Simulative Investigations

机译:抛物面结构硅表面,用于增强光吸收:实验和模拟调查

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摘要

In this paper, we present an optical model that simulates the light trapping and scattering effects of a paraboloid texture surface first time. This model was experimentally verified by measuring the reflectance values of the periodically textured silicon (Si) surface with the shape of a paraboloid under different conditions. A paraboloid texture surface was obtained by electrochemical etching Si in the solution of hydrofluoric acid, dimethylsulfoxide (DMSO), and deionized (DI) water. The paraboloid texture surface has the advantage of giving a lower reflectance value than the hemispherical, random pyramidal, and regular pyramidal texture surfaces. In the case of parabola, the light can be concentrated in the direction of the Si surface compared to the hemispherical, random pyramidal, and regular pyramidal textured surfaces. Furthermore, in a paraboloid textured surface, there can be a maximum value of 4 or even more by anisotropic etching duration compared to the hemispherical or pyramidal textured surfaces which have a maximum h/D (depth and diameter of the texture) value of 0.5. The reflectance values were found to be strongly dependent on the h/D ratio of the texture surface. The measured reflectance values were well matched with the simulated ones. The minimum reflectance value of similar to 4 % was obtained at a wavelength of 600 nm for an h/D ratio of 3.75. The simulation results showed that the reflectance value for the h/D ratio can be reduced to similar to 0.5 % by reducing the separations among the textures. This periodic paraboloidal structure can be applied to the surface texturing technique by substituting with a conventional pyramid textured surface or moth-eye antireflection coating.ud
机译:在本文中,我们提出了一种光学模型,该光学模型首次模拟了抛物面纹理表面的光捕获和散射效果。通过测量在不同条件下具有抛物面形状的周期性纹理化的硅(Si)表面的反射率值,通过实验验证了该模型。通过在氢氟酸,二甲基亚砜(DMSO)和去离子(DI)水的溶液中对硅进行电化学蚀刻,可获得抛物面纹理表面。抛物面纹理表面具有比半球形,随机金字塔形和规则金字塔形纹理表面具有更低反射率值的优势。在抛物线的情况下,与半球形,随机金字塔形和规则金字塔形纹理表面相比,光可以集中在Si表面的方向上。此外,在抛物面纹理化表面中,与最大h / D(纹理的深度和直径)值为0.5的半球形或金字塔形纹理化表面相比,各向异性蚀刻持续时间的最大值可以为4甚至更大。发现反射率值强烈依赖于纹理表面的h / D比。测得的反射率值与模拟值非常匹配。在h / D比为3.75的情况下,在600 nm波长下获得的最小反射率值接近4%。仿真结果表明,通过减少纹理之间的间距,可以将h / D比的反射率值降低至接近0.5%。通过用常规的金字塔纹理表面或蛾眼抗反射涂层代替,这种周期性的抛物面结构可以应用于表面纹理化技术。

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