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Modelling of layered surface acoustic wave resonators for liquid media sensing applications

机译:用于液体介质传感应用的分层表面声波谐振器的建模

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摘要

In this thesis a model is developed to characterise the behaviour of layered SAW 2- port resonator sensors operating in liquid media. In the critical review of literature, it is found that methods based on the periodic Green's function combined with the COM model are best suited to this task. However, an important deficiency of this approach is the lack of a good model for electrodes buried within layered media. This deficiency is resolved in this thesis by the formulation of a periodic matrix eigen-operator, using a phase-shifted Fourier series representation. This model is then utilised in the study of resonator behaviour as a function of guiding layer thickness, including the mass sensitivity. Based on this modelling work, a SAW resonator structure is designed, and its frequency response is found to be in generally good agreement with theoretical predictions. The mass sensitivity of this device is then analysed using both theoretical and experimental means. In contrast to the sensitivity analyses found in the literature, sensitivity variation across the device surface is considered in this work. For the resonator structure it is found that sensitivity is greatest at the device centre, with the ends of the device making negligible contribution to the complete device response. The result is that the sensitive material may be deposited only in a small region in the centre of the device, with minimal reduction in device response.
机译:在本文中,开发了一个模型来表征在液体介质中工作的分层SAW 2端口谐振器传感器的行为。在对文献的严格审查中,发现基于周期性格林函数与COM模型相结合的方法最适合此任务。但是,这种方法的一个重要缺陷是缺乏埋在分层介质中的电极的良好模型。本文通过使用相移傅里叶级数表示法构造周期矩阵本征算子,解决了这一缺陷。然后,将该模型用于研究谐振器行为,将其作为导向层厚度(包括质量灵敏度)的函数。在此建模工作的基础上,设计了SAW谐振器结构,发现其频率响应与理论预测基本吻合。然后使用理论和实验手段分析该设备的质量敏感性。与文献中的灵敏度分析相比,这项工作考虑了整个器件表面的灵敏度变化。对于谐振器结构,发现灵敏度在设备中心最大,而设备的端部对整个设备响应的贡献可忽略不计。结果是,敏感材料可以仅沉积在设备中心的一小部分区域中,而设备响应的降低最小。

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    Powell D;

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