Summary Report: Workshop on Industrial Applications of Scanned Probe Microscopy(2nd). A Workshop Co-Sponsored by NIST, SEMATECH, ASTM E42.14, and the American Vacuum Society. Held in Gaithersburg, Maryland on May 2-3, 1995

摘要

The Second Workship on Industrial Applications of Scanned Probe Microscopy(IASPM) was held at the National Institute of Standards and Technology (NIST) Gaithersburg, MD on May 2-3, 1995. The meeting, co-sponsored by NIST, SEMATECH, the American Society for Testing and Materials (ASTM) E.42.14 Subcommittee, and the Manufacturing Science and Technology Group of the American Vacuum Society, was attended by approximately one hundred scanned probe microscopy (SPM) users, suppliers, and researchers from industry, government, and academia. This Summary Report presents an overview of industrial applications of SPM in the areas of magnetic recording technology, polymers and coatings, and semiconductors, and reviews recent progress on SPM standardization and tool development.