Workshop Summary Report: Industrial Applications of Scanned Probe Microscopy. AWorkshop Co-sponsored by NIST, SEMATECH, ASTM, E42.14, and the American Vacuum Society. Held in Gaithersburg, Maryland on March 24-25, 1994

摘要

This report is a summary outcome statement for the Industrial Applications ofScanned Probe Microscopy (SPM) workshop which was held at National Institute of Standards and Technology (NIST) Gaithersburg on March 24-25, 1994. The meeting, co-sponsored by NIST, SEMATECH, ASTM E42.14, and the American Vacuum Society, was attended by over one hundred SPM users, suppliers, researchers and program managers from industry, government, and academia. The focus of the workshop was on fostering a common understanding of the roles of each of these groups in evolution of applied SPM, to achieve a consensus view on standard practices of SPM-based measurements, and to establish the basic features required of future generations of commercially available SPMs required for quantitative measurement. This report assesses the effectiveness of the workshop format and concludes with specific recommendations for a second, follow-up workshop.