Standard Reference Materials: The Certification of 100 mm Diameter SiliconResistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements

摘要

This report documents the selection of material, the certification procedure andits control, and the analysis of measurement uncertainty for a family of new and improved Standard Reference Materials for sheet resistance and resistivity of silicon wafers, SRMs 2541 through 2547, covering the resistivity range 0.01 omega-cm through 200 omega-cm. These SRMs, made from 100 mm silicon, replace previous SRM sets 1521 through 1523, which used 50.8 mm (2 in) diameter silicon at the same nominal resistivity levels.