Standard Reference Materials: The Certification of 100 mm Diameter Silicon211 Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe 211 Measurements. 1999 Edition

摘要

This report documents the selection of material, the certification procedure and211u001eits control, and the analysis of measurement uncertainty for a family of new and 211u001eimproved Standard Reference Materials (SRMs) for sheet resistance and resistivity 211u001eof silicon wafers, SRMs 2451 through 2547, covering the resistivity range 0.01 211u001eohm-cm through 200 ohm-cm. This revised report contains new appendices 7 and 8 211u001ethat detail the data anlayses of SRMs 2543 and 2544. It also contains updated 211u001eTables 6 through 14, new Table 15, and a revised Section 8 on Conclusions to 211u001ereflect the incorporation of materials on SRMs 2543 and 2544.