Development of Measurement Capability for Micro-Vibration Evaluations with211 Application to Chip Fabrication Facilities

摘要

This report summarizes a study to measure micro-vibrations of ground motions at a211u001eproposed site to fabricate electronic IC chips. Current guidelines for semi-211u001econductor fabrication facilities recommend that they be subjected to less than 211u001e100 micro-inches per second RMS (root-mean-square) velocity in every on-third 211u001eoctave frequency band with a preferred range of 60 to 70 micro-inches per second. 211u001eThe site under study is located near a major expressway, a train thoroughfare, 211u001eand an active mining operation. The report also introduces the theoretical 211u001edevelopment for the relationship between frequency spectra and RMS values, which 211u001ecan be adopted for a wide range of applications on interpretations of the data 211u001eobtained from up-to-date data acquisition systems.