Fabrication, simulations, and measurements of self-assembled millimeter-wave antennas for system-on-chip applications

摘要

A micro-electro-mechanical systems fabrication process has been developed to create self-assembled on-chip high efficiency antennas. The self-assembly creates out-of-plane antenna structures, which can have good radiation efficiency on low resistivity substrates. The structural material is SU-8 and the self-assembly curvatures are defined lithographically. The losses are reduced by having the antennas, transmission lines, and an isolating conducting ground plane placed on top of the supporting (and lossy) dielectric layer. The fabrication process includes deposition of a thick metal layer, which envelopes the antenna structure. This paper presents the fabrication process for a self-assembled monopole antenna, and numerical and physical experiments for the antenna pattern characteristics. The physical measurements show a realized gain (includes mismatch loss) of -1.29 dBi at 59 GHz.