APEX Method and Real-Time Blind Deconvolution of Scanning Electron MicroscopeImagery

摘要

Loss of resolution due to image blurring is a major concern in electronmicroscopy. The point spread function describing that blur is generally unknown. This paper discusses the use of a recently developed FFT-based direct (non-iterative) blind deconvolution procedure, the APEX method, the can process 512 x 512 images in less than a minute on current desktop platforms. The method is predicated on a restricted but significant class of shift-invariant blurs, consisting of finite convolution products of Levy probability density functions. Such blurs considerably generalize Gaussian and Lorentzian point spread functions. In this paper, the method is applied to a variety of original SEM micrographs, and shown to be useful in enhancing and detecting fine detail not otherwise discernible. Quantitative sharpness analysis of 'ideal sample' micrographs, shows that APEX processing can actually produce sharper imagery than is achievable with optimal microscope settings.