Investigations into methods for obtaining electronic data processing systems of biological complexity indicate the feasibility of using over 1011 one-micron-sized active elements in a one-cubic-inch machine. An active element based upon the quantum mechanical tunneling of electrons from a metal into high vacuum is proposed that has an estimated switching time of 10 seconds; couples well to similar and accessory components; promises immunity to temperature variations; and seems adaptable to self-forming manufacturing methods giving component uniformity. Light detectors and generators and electrostatically operated electromechanical devices such as relays and filters seem to fulfill the requirements for accessory components so that all electronic functions could be accomplished with this microelectronic system; in addition, a micro document system would allow permanently stored data to be retrieved at a 1010 bit-per-second rate. A micromachining method for fabricating film materials is presented in which an electron beam is used to form a chemically resistant film on the ma¬terial being machined, which is subsequently etched in vacuum by a mo¬lecular beam. This high-speed process has resolution capabilities of several hundred angstrom units; can process electronically clean materials with minimum contamination; and may ultimately be suited for the economical production of one-cubic-inch data processing systems having 1011 active components.
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