Preliminary Survey Report: Control Technology for Gallium Arsenide Processing at Morgan Semiconductor Division, Garland, Texas

摘要

The report covers a walk through survey made of the Morgan Semiconductor Facility (SIC-3674) in Garland, Texas, to evaluate control technology for gallium-arsenide (1303000) dust in the semiconductor industry. Engineering controls included the synthesis of gallium-arsenide outside the crystal pullers to reduce arsenic (7440382) residues in the pullers, also reducing worker exposure to arsenic during cleaning of the crystal pullers.