Etude des Surfaces d'InP et des Interfaces InP Isolant Par Photoluminescence (Photoluminescence Study of InP Surfaces and InP-Insulator Interfaces)

摘要

The effect of chemical or heat treatments on the luminescence spectra produced by InP surfaces or interfaces is studied. The application of the results to implement a process control system to manufacture MSI structures is described. The intensity of the spectral peaks is correlated to the electronic characteristics of the junction. It is shown that the described procedures are a valid contribution to improve electronic device quality.