Ellipsometric measurement of liquid film thickness

摘要

The immediate objective of this research is to measure liquid film thickness from the two equilibrium phases of a monotectic system in order to estimate the film pressure of each phase. Thus liquid film thicknesses on the inside walls of the prism cell above the liquid level have been measured elliposmetrically for the monotectic system of succinonitrile and water. The thickness varies with temperature and composition of each plane. The preliminary results from both layers at 60 deg angle of incidence show nearly uniform thickness from about 21 to 23 C. The thickness increases with temperature but near 30 C the film appears foggy and scatters the laser beam. As the temperature of the cell is raised beyond room temperature it becomes increasingly difficult to equalize the temperature inside and outside the cell. The fogging may also be an indication that solution, not pure water, is adsorbed onto the substrate. Nevertheless, preliminary results suggest that ellipsometric measurement is feasible and necessary to measure more accurately and rapidly the film thickness and to improve thermal control of the prism walls.