The JPL Microdevices Laboratory: Capabilities and Access

摘要

The Microdevices Laboratory (MDL) at JPL is a world-class microdevice and microinstrument research and advanced development center. It houses processing facilities for end-to-end device fabrication based on Si, GaAs, and superconductors down to 0.1 (micro)m feature size. MDL's charter is to develop and demonstrate new microdevice technologies, and to transfer these technologies to NASA users and to industry. In full operation since 1990, MDL has demonstrated rapid prototyping of several new microdevices and technologies.