Interferometric apparatus for ultra-high precision displacement measurement

摘要

A high-precision heterodyne interferometer measures relative displacement by creating a thermally-insensitive system generally not subject to polarization leakage. By using first and second light beams separated by a small frequency difference (.DELTA.f), beams of light at the first frequency (f.sub.0) are reflected by co-axial mirrors, the first mirror of which has a central aperture through which the light is transmitted to and reflected by the second mirror. Prior to detection, the light beams from the two mirrors are combined with light of the second and slightly different frequency. The combined light beams are separated according to the light from the mirrors. The change in phase (.DELTA..phi.) with respect to the two signals is proportional to the change in distance of Fiducial B by a factor of wavelength (.lambda.) divided by 4.pi. (.DELTA.L=.lambda..DELTA..phi.1/(4.pi.)). In a second embodiment, a polarizing beam splitting system can be used.