Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems211 (MEMS)

摘要

A review is made of the infrastructure, technology and capabilities of Sandia211u001eNational Laboratories for the development of micromechanical systems. By 211u001eincorporating advanced fabrication processes, such as chemical mechanical 211u001epolishing, and several mechanical polysilicon levels, the range of 211u001emicromechanical systems that can be fabricated in these technologies is virtually 211u001elimitless. Representative applications include a micro-engine driven mirror, and 211u001ea micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-211u001eof-freedom accelerometer/gyroscope system has been designed by researchers at 211u001eU.C. Berkeley and fabricated on the same silicon chip as the CMOS control 211u001ecircuits to produce an integrated micro-navigational unit.